High position resolution sensor with rectifying contacts

摘要

The invention provides a position sensor for detecting relative displacement between two elements, and includes an optical beam-producing source fixed to one of the elements, a semiconductor body fixed to a second element and arranged so that the beams impinge one surface of the semiconductor body, a planar sensor composed of a back-to-back diode photodetector positioned on the semiconductor surface, and readout means to monitor current generated by the sensor which gives a measure of the relative position between the element to which the semiconductor body is affixed.