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发明名称
MONITORING APPARATUS FOR DUST IN VACUUM
摘要
申请公布号
JPH0344539(A)
申请公布日期
1991.02.26
申请号
JP19890179009
申请日期
1989.07.13
申请人
ANELVA CORP
发明人
OSAKO SHINJI
分类号
G01N15/06;G01N1/28;G01N15/00;G01N15/14
主分类号
G01N15/06
代理机构
代理人
主权项
地址
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