| 摘要 |
The process is carried out between a first substrate (1) comprising a first layer of a first material and a second substrate (2) comprising a second layer (6) of a second material, the first material and the second material being of different natures and chosen from alloys of elements of columns III and V, the process comprising the steps of: a) providing the first substrate (1) and the second substrate (2); b) bringing the first substrate (1) and the second substrate (2) into contact so as to form a bonding interface (7) between the first layer and the second layer (6); c) carrying out a first heat treatment at a first predefined temperature; d) thinning one of the substrates (1,2); e) depositing, at a temperature lower than or equal to the first predefined temperature, a barrier layer (8) on the thinned substrate (1,2); and f) carrying out a second heat treatment at a second predefined temperature above the first predefined temperature. |
