| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate for a power module which prevents swell and wrinkles from occurring on a surface of a circuit layer and achieves excellent power cycle resistance.SOLUTION: In a substrate 3 for a power module, a circuit layer 6 made of aluminum or an aluminum alloy is laminated on a ceramic substrate 2, and a nickel plating layer 9 is formed on a surface of the circuit layer 6. Hard particles 10 are provided in the nickel plating layer 9 dispersing therein and are buried so as to avoid exposing on the outermost surface of the nickel plating layer 9. |
