FORMATION OF THIN TANTALUM OXIDE FILM,申请号JP19890299153-传众专利搜索

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发明名称	FORMATION OF THIN TANTALUM OXIDE FILM
摘要
申请公布号	JPH03162576(A)	申请公布日期	1991.07.12
申请号	JP19890299153	申请日期	1989.11.17
申请人	NIPPON SANSO KK	发明人	TABUCHI TOSHIYA
分类号	C23C16/40;H01L21/316	主分类号	C23C16/40
代理机构		代理人
主权项
地址

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