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发明名称
GROUP III AND V-BASED AMORPHOUS SEMICONDUCTOR THIN FILM
摘要
申请公布号
JPH03183121(A)
申请公布日期
1991.08.09
申请号
JP19890321966
申请日期
1989.12.12
申请人
OYO ZAIRYO KENKYUSHO:KK
发明人
ITO TADATSUGU
分类号
H01L21/20;C23C14/46;H01L21/203
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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