| 摘要 |
An insulated gate field effect device is disclosed having a channel region which includes both a horizontal and a vertical portion. The device is fabricated on a semiconductor substrate having a recess formed in its surface. The recess has a bottom forming a second surface with the wall of the recess extending between the first and second surfaces. A source region is formed at the first surface and a drain is formed at the second surface spaced apart from the wall. A channel region is defined along the wall and the second surface between the drain region and the source region. A gate insulator and gate electrode overlie the channel region.
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