BULK GAS SORPTION COMPOSITION AND APPARATUS

摘要

A gas supply and containment assembly (100) includes a gas cabinet (102) defining an interior volume (104) and including cabinet flow circuitry (106) coupleable to a high pressure gas cylinder (108) positionable in the gas cabinet (100), for flowing a hazardous constituent gas from the cylinder (108) through the flow circuitry (106) for discharge to end use facilities. An outer enclosure (110) contains the gas cabinet (102); a scrubber unit (112) including a sorbent material which is sorptively selective for the hazardous gas constituent; an enclosure flow circuitry (114) which is coupleable to a source of inert gas. Low level leakages are withdrawn in the inert gas flowed at a low rate into the gas cabinet (102) and scrubbed in the scrubber (112) in the outer enclosure (110).