THIN HARD AMORPHOUS CARBON-HYDROGEN-SILICON FILM HAVING LUBRICITY, FERROUS METALLIC MATERIAL HAVING THIS THIN FILM ON SURFACE, AND THEIR PRODUCTION,申请号JP19900237767-传众专利搜索

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发明名称	THIN HARD AMORPHOUS CARBON-HYDROGEN-SILICON FILM HAVING LUBRICITY, FERROUS METALLIC MATERIAL HAVING THIS THIN FILM ON SURFACE, AND THEIR PRODUCTION
摘要
申请公布号	JPH03240957(A)	申请公布日期	1991.10.28
申请号	JP19900237767	申请日期	1990.09.07
申请人	TOYOTA CENTRAL RES & DEV LAB INC	发明人	ARAI TORU;OGURI KAZUYUKI
分类号	C23C16/22;C23C16/26;C23C16/27;C23C16/32;C30B29/04	主分类号	C23C16/22
代理机构		代理人
主权项
地址

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