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发明名称
METHOD OF CENTER SEARCHING OF REFERENCE MARK ON SUBSTRATE
摘要
申请公布号
JPH03250799(A)
申请公布日期
1991.11.08
申请号
JP19900047600
申请日期
1990.02.28
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KAMIKAKOI KANZOU
分类号
H05K13/04;H05K13/08
主分类号
H05K13/04
代理机构
代理人
主权项
地址
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