发明名称 |
APPARATUS FOR THE INWARD AND OUTWARD TRANSFER OF A WORKPIECE IN A VACUUM CHAMBER |
摘要 |
An apparatus for the inward and outward transfer of a workpiece, particularly of a disk-shaped substrate in a vacuum chamber having a coating system comprising a cathode station. A conveyor means designed as a rotary table is situated inside the vacuum chamber. The rotary table accepts substrate holders which are designed as turned parts. A supporting plate is provided in the region of the inward transfer station. It supports the substrate holder and prevents a sagging thereof. The supporting plate also presses the substrate holder against the inside wall of the vacuum chamber; i.e. against a seal situated in the inside wall. As a result thereof, an air-tight separation of the inward transfer chamber from the vacuum chamber and from the atmosphere is achieved. A considerable reduction in the moved masses of the rotating component parts is achieved by a skillful designing and arrangement of the component parts. A reduction in the mass moments of inertia associated therewith results since the process cycles of the coating system can sequence more quickly.
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申请公布号 |
US5112469(A) |
申请公布日期 |
1992.05.12 |
申请号 |
US19900572263 |
申请日期 |
1990.08.27 |
申请人 |
LEYBOLD AKTIENGESELLSCHAFT |
发明人 |
KEMPF, STEFAN;ZEJDA, JAROSLAV |
分类号 |
B65G49/07;C23C14/50;C23C14/56;H01L21/677 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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