发明名称 |
Surface measuring method and apparatus |
摘要 |
A surface measuring method and apparatus utilizes a low energy neutral particle (neutral atom, neutral molecule) controlled to be equal to or lower than 1 eV, which is caused to collide against the surface of a specimen. A neutral particle reflected at the specimen surface is detected, and its energy is measured to non-destructively measure the chemical bonding state of the specimen surface.
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申请公布号 |
US5115130(A) |
申请公布日期 |
1992.05.19 |
申请号 |
US19900536152 |
申请日期 |
1990.06.07 |
申请人 |
HITACHI, LTD. |
发明人 |
SUZUKI, KEIZO;NINOMIYA, KEN;YUNOGAMI, TAKASHI |
分类号 |
H01J49/44;G01N23/20;H05H3/02 |
主分类号 |
H01J49/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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