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发明名称
LASER-BEAM SPUTTERING SYSTEM
摘要
申请公布号
JPH04187763(A)
申请公布日期
1992.07.06
申请号
JP19900317248
申请日期
1990.11.20
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
NISHIKAWA YUKIO;TANAKA KUNIO;YOSHIDA ZENICHI
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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