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发明名称
METHOD AND APPARATUS FOR CONTINUOUSLY FORMING LARGE-AREA FUNCTIONAL DEPOSITED FILM BY MICROWAVE PLASMA CVD METHOD
摘要
申请公布号
JPH04198481(A)
申请公布日期
1992.07.17
申请号
JP19900332678
申请日期
1990.11.29
申请人
CANON INC
发明人
KANAI MASAHIRO
分类号
C23C16/50;C23C16/511
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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