PROCESS FOR PREPARING RADIATION SENSITIVE COMPOUND AND POSITIVE RESIST COMPOSITION

摘要

A radiation sensitive compound prepared by reacting a phenol compound with a quinone diazide sulfonyl halide in a mixture of a solvent having a relative dielectric constant of not larger than 10 and a solvent having a relative dielectric constant of at least 15, which compound is less colored and gives a positive resist composition having a good resolution.