发明名称 |
Scanning electron microscope |
摘要 |
The present invention provides a composite charged particle beam device which is provided with two or more charged particle beam columns and enables high-resolution observation while a sample is placed at the position of a cross point. The present invention has the following configuration. A composite charged particle beam device is provided with a plurality of charged particle beam columns (101a, 102a), and is characterized in that a sample (103) is disposed at the position of an intersection point (171) where the optical axes of the plurality of columns intersect, a component (408a, 408b) that forms the tip of an objective lens of the charged particle beam column (102a) is detachable, and by replacing the component (408a, 408b), the distance between the intersection point (171) and the tip of the charge particle beam column can be changed. |
申请公布号 |
US9478389(B2) |
申请公布日期 |
2016.10.25 |
申请号 |
US201314422374 |
申请日期 |
2013.07.01 |
申请人 |
Hitachi High-Technologies Corporation |
发明人 |
Nomaguchi Tsunenori;Agemura Toshihide |
分类号 |
H01J37/10;H01J37/28;H01J37/147;H01J37/22;H01J37/305;H01J37/317;H01J37/26;H01J37/141;H01J37/16;H01J37/30 |
主分类号 |
H01J37/10 |
代理机构 |
Crowell & Moring LLP |
代理人 |
Crowell & Moring LLP |
主权项 |
1. A scanning electron microscope, comprising:
an electron beam column including an objective lens; wherein the objective lens includes a body and a detachable component that forms a tip. |
地址 |
Tokyo JP |