| 摘要 |
PURPOSE:To provide the washing device which does not leak the atmosphere in a washing chamber to the outside. CONSTITUTION:This washing device is provided with washing chambers 19, 25, 27 which wash objects to be treated, a transporting unit which transports the objects to be treated to the washing chambers 19, 25, 27 and a transporting chamber 23 which has the transporting unit. The device is also equipped with 1st pressure reducing mechanisms 63, 65, 67, 78 which reduce the pressure of the atmosphere in the transporting chamber 23 so as to generate 0 to 0.02mmH2O differential pressure therein with respect to the atmosphere on the outside of the device and 2nd pressure reducing mechanisms 63, 65, 67, 78 which reduce the pressure of the atmosphere in the washing chambers 19, 25, 27 so as to generate 0 to 0.02mmH2O differential pressure therein with respect to the atmosphere in the transporting chamber 23.
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