| 摘要 |
PURPOSE:To prevent the variation of machining quality by the direction of machining and the position of machining by arranging a turning mirror so that there is no overlapping of optical path in a discharge excitation space. CONSTITUTION:An optical resonator 13 is composed of a reflecting mirror 3, turning mirrors 5, 7 and an output mirror 9, the optical path LP of laser beams is foled several times in a gas flow F and amplified, and an laser output is extracted. The turning mirrors 5, 7 are arranged so that there is no overlapping section a1, a2 of the optical path LP in a discharge excitation space 11 at that time, and the discharge excitation space 11 is formed. Accordingly, since the overlapping sections a1, a2 are positioned outside the discharge excitation space 11, isotropic beams are acquired, machining quality such as curve width, surface roughness, etc., do not differ by the direction of machining of the device, trouble such as the change of machining quality by the position of machining is solved, and the machining performance of the device can be improved. |
