发明名称 |
ULTRAVIOLET CURING TYPE RESIN COMPOSITION |
摘要 |
PURPOSE:To provide a low-viscosity resin composition easily cured by irradiation with active energy rays and soluble and peelable by alkali, and especially, to provide the ultraviolet curing type resin composition superior as a resin composition used for an etching resist. CONSTITUTION:This ultraviolet curing type resin composition is characterized by comprising a compound having one carboxylic group and one acryloyl or methacryloyl group in one molecule; a compound having >=2 acryloyl or methacryloyl group in one molecule; a leveling agent; and a tertiary amine photoinitiator and/or a thioxantone type photoinitiator, and having a viscosity of <=5000cps at 25 deg.C. |
申请公布号 |
JPH05100423(A) |
申请公布日期 |
1993.04.23 |
申请号 |
JP19910284021 |
申请日期 |
1991.10.04 |
申请人 |
TOAGOSEI CHEM IND CO LTD;DAINIPPON SCREEN MFG CO LTD |
发明人 |
IGARASHI ICHIRO;SASAKI YUTAKA;JITSUMATSU TETSUJI;OTA HIROYUKI;SATO MASANOBU;NISHIMUTA HIROSHI |
分类号 |
C09D4/02;C08F2/44;C08F2/50;C08F20/10;C08F20/26;C08F220/26;C08F220/28;C09D4/00;C09D5/00;C09D7/06;C09D7/12;G03F7/004;G03F7/027;G03F7/028;H01L21/027;H01L21/30 |
主分类号 |
C09D4/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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