Light measurement arrangement for detecting surface defects - contains laser source, rotating specimen holders, linearly movable sensor unit with two receivers, one being multiple ring detector

摘要

The measurement arrangement consists of a laser source (6), a rotating specimen (10) holder (2), a drive motor (3) and a sensor unit (1) with two receivers. One receiver is a multiple ring detector (4) for detecting the radial distribution and the other an annular array (5) for detecting azimuthal distribution. There is a beam shaping device and a device for distributing the laser beam onto the specimen and the reflected scattered light onto the receiver. The sensor unit is linearly movable over the radius of the rotating specimen holder. The linear motion is realised by coupling the sensor unit to a linear motor. USE/ADVANTAGE - Precision detection of scratches, fissures, point defects etc.