| 摘要 |
PURPOSE:To obtain an excimer laser equipment suitable for increasing the life of a main electrode. CONSTITUTION:The capacitance of each peaking capacitor C2 in a discharge circuit is changed according to the wastage distribution of a main electrode E in the longitudinal direction. Further, the connection position of each peaking capacitor C2 to the main electrode E in the discharge circuit may be changed according to the wastage distribution of the main electrode E in the longitudinal direction. |
