Tube apparatus for manufacturing semiconductor device.

摘要

Disclosure relates to a tube apparatus for manufacturing a semiconductor device constituted by a cylindrical tube (11) having a door for loading a semiconductor wafer. One end of the tube is closed and two openings (12 and 13) are formed near the one end. The other end is conic and an opening (15) is formed in the tip thereof. A saddle having two opening is mounted on the tube so that two openings thereof correspond to the two openings of the tube placed near the closed end. Using the tube apparatus enhances the efficiency of a diffusion process. The residue does not remain in the tube so that the tube can be used semi-permanently. <IMAGE>