Detecting absolute displacement of object, e.g. servomotor shaft - operating micromachine with elements made from polycrystalline silicon in magnetic field as object moves, and storing relative positions of micromachine elements

摘要

The method involves using a magnetic flux generator (11), displacing the object, operating a micromachine (16) according to the flux generated, mechanically storing an actuation behaviour for the micromachine corresp. to the displacement, and measuring the displacement from the relative positions of the elements of the micromachine. The micromachine contains a number of elements and is made from polycrystalline silicon using a CVD method. ADVANTAGE - Compact and operates reliably without reserve batteries.