| 摘要 |
<p>A bubbler for use in vapour phase deposition of organometallic compound comprises a receptacle (12) for the organometallic compound, an inlet tube (14) for carrier gas, an outlet tube (16) for carrier gas saturated or partially saturated with the organometallic compound, a valved interconnecting tube (22, 24) between the inlet and outlet tubes and a valve (18 and 20 respectively) in each of the inlet and outlet tubes between the interconnecting tube and the receptacle.</p> |
