| 摘要 |
<p>Circuitry and techniques designed to allow stable and continuous delivey of alternating power to a processing plasma with switch-mode power supply (16) include a variety of embodiments. Parallel, series, and other circuit elements connected across switching element (7) are tuned so that energy at other than the fundamental frequency is absorbed and dissipated. This energy may be only at the second harmonic or it may be across broad frequency ranges through selecting high impedance at the fundamental frequency and relatively low impedance at other frequencies. In overcoming instabilities, oscillations, and even changing class of operation of the switch-mode power supply, the stabilizing element absorbs the energy to avoid allowing it to affect switch (7) of power supply (16).</p> |
