OVERPRESSURE-PROTECTED, POLYSILICON, CAPACITIVE DIFFERENTIAL PRESSURE SENSOR AND METHOD OF MAKING THE SAME

摘要

A capacitive differential pressure sensing device with pressure overrange protection and a method of making the same are described. The device employs a doped polysilicon diaphragm overlying a cavity in a doped single crystal silicon wafer having a port extending into the cavity from the opposite side. The cavity floor serves as an overrange protector.