发明名称 CHEMICAL RAY REACTIVE POLYMER COMPOSITION
摘要 PURPOSE:To obtain a chemical ray reactive polymer compsn. having high sensitivity by constituting the compsn. of specified polymer, compd., and photocharge transfer compd. CONSTITUTION:This compsn. consists of a polymer having a structural unit expressed by formula, a compd. having unsatd. bonds and amino groups or its quaternery salt, and a photocharge transfer compd. In formula, R1 is a tervalent or quadrivalent org. group having at least two carbon atoms, R2 is a bivalent org. group having at least two carbon atoms, R3 is hydrogen, alkali metal ion or ammonium ion, and n is 1 or 2. R1 is preferably a tervalent or quadrivalent group having 6-30 carbon number and containing an aromatic ring or aromatic heteroring. R2 is preferably a bivalent group having 6-30 carbon number and containing an aromatic ring or aromatic heterocycle.
申请公布号 JPH05333552(A) 申请公布日期 1993.12.17
申请号 JP19920141478 申请日期 1992.06.02
申请人 TORAY IND INC 发明人 TOMIKAWA MASAO;ASANO MASAYA
分类号 G03F7/027;G03F7/028;G03F7/038;H01L21/027;H01L21/312;(IPC1-7):G03F7/038 主分类号 G03F7/027
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