SCANNING POWER MICROSCOPE

摘要

PURPOSE: To obtain a scanning force microscope in which a sensor head approaches a specimen automatically by providing a driver means with motor for driving the sensor head to approach a sample. CONSTITUTION: An adjustable motor driven leg 16 is provided and the body of a microscope is moved in dimensions vertical to a specimen 18. Each motor driven leg 16 has an optical encoded screw drive motor 17 coupled with a control unit. A feedback control means 110 elevates/lowers a sensor head assembly with respect to the specimen 18 and increases/decreases the force of a probe chip thus sustaining a constant force for the surface of the specimen 18. Furthermore, a piezoelectric driver is connected through control lines 114a-114c in order to raster scanning the sensor head assembly on a horizontal plane in X and Y directions. The motor 17 is also connected through a control line 116 with the control means 110 in order to regulate the operation uniformly at the time of elevating/lowering the microscope.