发明名称 Method of testing data-holding capability of a semiconductor memory device
摘要 Test data is written into respective semiconductor memory devices, e.g., EEPROMs formed on a wafer. Then, the semiconductor memory devices, still located on the wafer, are baked in a high-temperature atmosphere for a predetermined time. Examples of the baking temperature and time are 200 degrees C. and 8 hours. The test data is read from the respective semiconductor devices to check whether the test data is held by the respective memory devices in a correct manner.
申请公布号 US5287313(A) 申请公布日期 1994.02.15
申请号 US19920903739 申请日期 1992.06.24
申请人 ROHM CO., LTD. 发明人 OKAJIMA, SUSUMU
分类号 G01R31/26;G01R31/28;G11C29/50;H01L21/66;(IPC1-7):H01L21/66;H01L29/78 主分类号 G01R31/26
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