ROTARY PADDLE TREATMENT DEVICE

摘要

PURPOSE:To reduce an amount of treatment liquid, to eliminate the need for exchange of liquid and to reduce a treatment space by mounting a work on a treatment station without immersing the work in treatment liquid and by treating it while rotating it according to a proper treatment time. CONSTITUTION:A paddle treatment tank 1 receives treatment liquid which is dropped by a treatment liquid nozzle 7 to a work 2 such as a glass substrate and is formed to a bottomed box of a proper size whose upper surface is opened. A rotary table 3 provided inside the paddle treatment tank 1 receives the work 2 transferred from a preceding process of the paddle treatment tank 1 along a transfer line 4 and sends it to the following process after treatment while rotating it inside the paddle treatment tank 1. Since treatment liquid is just dropped on an upper surface of a work for each thereof without using a conventional dip tank wherein treatment liquid is stored, there is no need to exchange treatment liquid properly. Furthermore, since a work is treated inside a paddle treatment tank, it is possible to reduce a space for treatment.