| 摘要 |
PURPOSE: To improve reliability and reduce price by making diaphragms move so that connection portions thereof do not come into contact with each other when a chamber seal fails. CONSTITUTION: When diaphragms 14 and 16 are internally pressurized with an external low pressure, electrical contact is not formed. When the diaphragms 14 and 16 are externally pressurized, electrical contact is formed. Pressurization of a chamber 12 partitioned by the diaphragms 14 and 16 can be performed in a pressurization atmosphere of argon in diaphragm assembling. If a pressure leaks into the chamber 12 or if a pressurization vessel is monitored in such leak, electrical contact between the diaphragms 14 and 16 is damages and is discontinuous. |
