| 摘要 |
PURPOSE:To provide an apparatus for wire bonding while monitoring oxygen concentration of a chamber and holding the concentration at an allowed value or less in a wire bonder for wire bonding in an inert gas atmosphere. CONSTITUTION:The wire bonder comprises sampling means 14, 44 for sampling gas in a chamber 20 to be supplied with nitrogen gas from nitrogen gas supply means 36, a gas analyzer 43 for analyzing sampled gas, and regulating means 38, 39 for regulating quantities of the gas to be supplied from the means 36 to an operating space 26 of the chamber 20 according to an analyzed result of the analyzer 43. Thus, if the oxygen concentration of the chamber 20 is raised, a nitrogen gas supply amount to the chamber 20 is increased to decrease the concentration in the chamber 20. |
