发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND PHOTOSENSITIVE ELEMENT USING THE SAME
摘要 PURPOSE:To obtain excellent resistance to plating and to prevent the generation of the scum of development by incorporating specified ethylenic unsatd. compd., org. halogen compd., film-property imparting polymer and a photoinitiator and/or photoinitiators. CONSTITUTION:The photosensitive resin contains at least one ethylenic unsatd. compd. expressed by the formula, org. halogen compd., film-property imparting polymer and photoinitiator which can generate free radical by active ray and/or photoinitiators, and the element consists of the layers of the composition and the supporting body film which supports the layers. In the formula, each of R1 and R4 is hydrogen atom or methyl group independently, each of R2 and R3 is ethylene group or propylene group, but R2 and R3 is inevitably different from each other, if R2 is propylene group, (m)is integer 1-2 and (n) is integer >=1, if R3 is propylene group, (n) is integer 1-2 and (m) is integer >=1.
申请公布号 JPH0675371(A) 申请公布日期 1994.03.18
申请号 JP19920227082 申请日期 1992.08.26
申请人 HITACHI CHEM CO LTD 发明人 SAWABE MASARU;ISHIMARU TOSHIAKI;NAKAMURA MITSUYOSHI;MASAOKA KAZUTAKA;ICHIKAWA TATSUYA;YANO MASAJIRO;KOBAYASHI AKIHIRO;AKIMA TOSHIO
分类号 G03C1/675;G03F7/004;G03F7/027;G03F7/028;G03F7/033;H01L21/027;H05K3/18;(IPC1-7):G03F7/027 主分类号 G03C1/675
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