Verfahren zur Herstellung eines Artikels mit Mehrlagen-Hartbeschichtung und danach hergestellter Artikel

摘要

This present invention provides a hard multilayer coated product comprising a hard wear-resistant titanium compound coating layer, a titanium compound layer having a compositional gradient and a self-lubricating coating layer comprising hard amorphous carbon as the principal component successively formed on the surface of a substrate, the first layer being formed at about 500 DEG C. by the plasma CVD method in a vacuum followed by the formation of the second and third layers at 250 DEG to 400 DEG C. in a vacuum maintained at the same level as above. The hard multilayer coated product is improved in wear-resistance and self-lubricity.