| 摘要 |
PURPOSE:To obtain an excellent S/N ratio and observe the surface of a sample by a nanometer by composing a probe part of a light-transmissive base body and extremely small projections arranged on the base body surface, and detecting scattered light from the sample above the base body. CONSTITUTION:The probe part of the scanning type optical microscope which has a feed mechanism for scanning the sample in three dimensions consists of the light-transmissive base body 1 and extremely small projections 2 arranged on the base body surface; and the extremely small projections 2 are set opposite the sample 3 and light is made incident on the light-transmissive base body 1 in a total reflection state on the opposite side, so that the scattered light from the sample 3 is detected above the base body. The extremely-small- projection arrangement surface of the light-transmissive base body 1 is formed of a flat plate, a slanted surface, or a curved surface, and the extremely small projections 2 are preferably extremely small spherical bodies. Then a generated extinction wave is not directly used, but made to irradiate the probe and then a singular near field is produced around it; and the scattered light emitted from it is detected to obtain an image.
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