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发明名称
Semiconductor Integrated Circuit Device
摘要
申请公布号
CA2111367(A1)
申请公布日期
1994.06.19
申请号
CA19932111367
申请日期
1993.12.14
申请人
MITSUBISHI DENKI KABUSHIKI KAISHA
发明人
YOKOTA, MIHO;OKABE, MASATOMI
分类号
H01L21/82;H01L27/118;(IPC1-7):H01L27/02
主分类号
H01L21/82
代理机构
代理人
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