发明名称 MOUNTING DEVICE
摘要 <p>PURPOSE:To allow judging of the quality of an adhesive layer directly after mounting while real-time finding a detective product. CONSTITUTION:This mounting device is provided with a mounting head 10 pressing a semiconductor chip 1 on a mounting substitute 3 through an adhesive layer 2, a position sensor 13 detecting a position of the mounting head 10 in a pressure process and a quality judging part 19 judging the quality of the adhesive layer 2 from the position detected by this position sensor 13. Since in this constitution the quality of the adhesive layer 2 is made to be judged from the position detected by the position sensor 13, the quality of the adhesive layer 2 can be judged directly after mounting without taking out a product from a mounting device while real-time finding a defective product.</p>
申请公布号 JPH06177181(A) 申请公布日期 1994.06.24
申请号 JP19920321983 申请日期 1992.12.01
申请人 TOSHIBA CORP 发明人 YAMANAKA KAZUYUKI
分类号 H01L21/52;H01L21/66;H01L21/68;H05K13/04;(IPC1-7):H01L21/52 主分类号 H01L21/52
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