Method of forming a dielectric layer.

摘要

A method of forming a dielectric layer (19, 21, 22) provides the dielectric layer (19, 21, 22) with a substantially uniform density. A plasma of an activation gas (16) is formed wherein the activation gas plasma is substantially devoid of other gases. The plasma of the activation gas (16) is maintained until the plasma becomes stable. After stabilization is achieved, dielectric formation is initiated by adding a dielectric precursor gas (18) to the plasma of the activation gas thereby forming a plasma of the dielectric precursor gas.