发明名称 Method of Making White Diamond Film
摘要 Polycrystalline diamond film material obtainable by chemical vapor deposition has an optical absorbence of less than 10 per centimeter and a lateral thermal conductivity by conveying wave of at least about 13 watts per centimeter per degree Celsius. The diamond film with substantially no non-diamond carbon and a high thermal conductivity is deposited by means of a direct current arc jet apparatus with a substrate temperature below about 975 degrees Celsius, an arc power of between about 20 and 40 kw. a pressure of about 1.60 kPa (12 torr), and an enthalpy greater than 30 from a activated gas jet fed with hydrogen and methane, the methane being supplied at a concentration of less than 0.07%. The resulting material has a high transparency and thermal conductivity. Also disclosed is the use of the diamond material made by the present method for cutting tool applications, particularly milling.
申请公布号 CA2112308(A1) 申请公布日期 1994.07.23
申请号 CA19932112308 申请日期 1993.12.23
申请人 NORTON COMPANY 发明人 BIGELOW, LOUIS K.;GRAY, KEVIN J.;LU, GRANT;SIMPSON, MATTHEW A.;CANN, GORDON L.
分类号 C30B29/04;C23C16/27;(IPC1-7):C01B31/06;C23C16/26 主分类号 C30B29/04
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