APPARATUS AND METHOD FOR SCANNING AN OBJECT THROUGH A FLUID STREAM

摘要

An apparatus for treating the surface of a microelectronic workpiece via impingement of the surface with at least one fluid and a method for operating the apparatus are described. In particular, the apparatus includes a treatment chamber defining an interior space to treat the microelectronic workpiece with at least one fluid within the treatment chamber, and a movable chuck that supports the workpiece within the treatment chamber. The apparatus further includes a workpiece translational drive system configured to translate the movable chuck between a workpiece load position and at least one processing position at which the workpiece is treated with the at least one fluid using at least one nozzle connected to at least one fluid supply, and a workpiece rotational drive system configured to rotate the microelectronic workpiece.

主权项

1. An apparatus for treating the surface of a microelectronic workpiece via impingement of the surface with at least one fluid spray, said apparatus comprising:
a treatment chamber defining an interior space to treat a-the microelectronic workpiece with at least one fluid spray within said treatment chamber; a linearly translatable and rotatable chuck that supports said microelectronic workpiece within said treatment chamber, said microelectronic workpiece having an upper surface exposed in a position for treatment by said at least one fluid spray, wherein the chuck comprises first and second, pre-determined, indexed rotational orientations that are controllable such that the workpiece is linearly scanned through said at least one fluid spray in a first linear scan while the workpiece is supported on the chuck in the first rotational indexed orientation and such that the workpiece is linearly scanned through said at least one fluid spray in a second linear scan while the workpiece is supported on the chuck in the second rotational indexed orientation; a workpiece translational drive system operatively coupled to said linearly translatable and rotatable chuck and configured to linearly translate said linearly translatable and rotatable chuck to a workpiece load position and through the fluid spray during the first and second linear scans; a workpiece rotational drive system operatively coupled to said treatment chamber and configured to rotate said huck to rotational positions comprising the first and second indexed rotational positions while the workpiece is supported on the chuck; and at least one nozzle connected to at least one fluid supply and arranged within said treatment chamber in a manner effective to direct said at least one fluid spray towards said upper surface of said microelectronic workpiece during the first and second linear scans.