| 摘要 |
PURPOSE:To omit a step of masking in a mask by a method wherein a cover for shielding a positioning mark of a mask and a positioning mark of a substrate from alignment at aligning is fixed so as to shield the positioning mark of a mask and the positioning mark of a substrate from aligning beams. CONSTITUTION:A microscope 2 is provided so as t be a symmetrical shape on both right and left sides of a mask 1. However, the right-sided microscope 2 is not shown. A shielding cover 3 is fixed over the microscope 2. This cover 3 at all times interrupts aligning beams 4 emitted from above. Accordingly, a positioning mark 5 of a mask 1 is at all times shielded. In other words, the positioning mark 5 of the mask 1 and a positioning mark 7 of a substrate 6 are interrupted from the aligning beams 4 by both a position at aligning and a position at mark positioning. |
