发明名称 Diamond covered member and process for producing the same.
摘要 A diamond covered member is provided which has a diamond crystal layer formed by vapor phase synthesis on a surface of a substrate, the diamond crystal layer being constituted of plate-shaped diamond crystals (2) at least at an initial stage of crystal growth, and being a polycrystal film formed by growth and coalescence of the plate-shaped diamond crystals, and the polycrystal film being uniformly oriented and having surface roughness (Rmax) of not larger than 0.2 mu m. A process for producing the diamond covered member is also provided. The diamond covered member has high hardness, high thermal conductivity, and high chemical stability. <IMAGE>
申请公布号 EP0614998(A1) 申请公布日期 1994.09.14
申请号 EP19940103609 申请日期 1994.03.09
申请人 CANON KABUSHIKI KAISHA 发明人 HIRABAYASHI, KEIJI, C/O CANON KABUSHIKI KAISHA
分类号 C30B29/04;C23C16/27;C30B25/02;C30B25/10;H01L21/205;H01L23/14 主分类号 C30B29/04
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