SCANNING PROBE MICROSCOPE AND ATOMIC SPECIES IDENTIFICATION METHOD

摘要

PURPOSE:To enhance the function of the apparatus as well as to identify atomic species by a method wherein a relative position of a cantilever having a conductive probe and a specimen is controlled and a deflection quantity of the cantilever due to atomic force or the like between the probe and the specimen is measured, further the deflection quantity can be controlled. CONSTITUTION:A specimen 6 of a crystal of InSb is located on a specimen table 7 and a magnetic field control device 13 controls a deflection quantity of the cantilever 3 via a magnetic field generation device 12 by using an output of an optical diode 11 so that a distance between the specimen 6 and a probe 1 is maintained to a prescribed. Next, a voltage of near one volt is applied to the specimen 6 by a voltage generation device 15 so that the distance between the specimen 6 and a probe 1 is shortened. When a current-measurement device 16 detects a tunnel current, a position control device 17 controls to move the specimen 6 in the Z direction so as to maintain the current to a prescribed value via a specimen driving device 9. The specimen 6 is scanned on an XY plane and data of a control quantity of the device 9 and that of the 256X256 points of device 12 are inputted to a computer 14 to indicate them by a density image. From the image and a density image at the applied voltage of near minus one volt, atomic arrangements of both In and Sb are clearly observed.