| 摘要 |
PURPOSE:To eliminate the centralization of pulse discharge for stable pulsed laser oscillation and higher efficiencies of laser oscillation. CONSTITUTION:The discharge input energy density for each split electrode 11a, 11b,...13b, placed in a laser tube 10 is controlled according to the distribution of laser gas flow rate. For example, high discharge energy is inputted to the split electrodes 11a and 11b corresponding to the range of high laser gas flow rate; low discharge energy is inputted to the split electrodes 12a, 12b, 13a and 13b corresponding to the range of low flow rate. Thus, the split electrodes 11a and 11b in the high flow rate range produce stable pulse discharge at a high discharge density; the split electrodes 12a, 12b, 13a and 13b in the low flow rate range cause weak discharge and excitation, which reduces laser amplification and light absorption. |
