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发明名称
Vorrichtung zum Verdampfen und Einspeisen einer Flüssigkeit.
摘要
申请公布号
DE69200451(D1)
申请公布日期
1994.11.03
申请号
DE19926000451
申请日期
1992.02.04
申请人
APPLIED MATERIALS, INC., SANTA CLARA, CALIF., US;LINTEC CO., LTD., SHIGA, JP
发明人
NISHIZATO, HIROSHI, NARITA-SHI, CHIBA, JP;ONO, HIROFUMI, SHIGA, JP
分类号
C23C16/44;B01F3/02;B01J3/02;C23C16/448;C23C16/455;H01L21/205;H01L21/31;(IPC1-7):B01J3/02
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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