Plasma stabilizing apparatus employing feedback controls

摘要

PCT No. PCT/JP91/01617 Sec. 371 Date Jul. 27, 1992 Sec. 102(e) Date Jul. 27, 1992 PCT Filed Nov. 26, 1991 PCT Pub. No. WO92/10076 PCT Pub. Date Jun. 11, 1992.A plasma stabilizing apparatus having circuits for measuring electron temperature and electron density of a plasma using triple probes, a plasma gas pressure control circuit, and a plasma excitation power control circuit, for automatically stabilizing the plasma.