发明名称 |
Storage capacitor with a conducting oxide electrode for metal-oxide dielectrics |
摘要 |
A capacitor having a high dielectric constant and method of making the same is disclosed. The capacitor comprises a bottom electrode comprising a conductive oxide deposited upon a substrate by chemical vapor deposition. A dielectric layer having a high dielectric constant is deposited upon the conductive oxide. Lastly, a counter electrode is formed upon the dielectric layer.
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申请公布号 |
US5383088(A) |
申请公布日期 |
1995.01.17 |
申请号 |
US19930103620 |
申请日期 |
1993.08.09 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHAPPLE-SOKOL, JONATHAN D.;CONTI, RICHARD A.;GAMBINO, JEFFREY P. |
分类号 |
H01L27/04;H01L21/02;H01L21/822;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):H01G1/01 |
主分类号 |
H01L27/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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