| 摘要 |
PURPOSE:To provide an optical waveguide device by which sufficiently stable feedback of light can be obtained even by using cleavage or dry etching and a stable operation can be performed and high yield can be obtained. CONSTITUTION:This device is constituted in such a way that the full width at half maximum in the distribution of electric field in the lateral direction of light propagating on a waveguide part in the neighborhood of end face mirrors 106, 107 that is the light reflecting part of light of a light interference system can be set smaller than that in the lateral direction of light propagating on a second waveguide 172 by setting the inclination of beam splitters 104, 105 against waveguide light propagating on a first waveguide 171. Therefore, it is possible to remarkably reduce the influence of disturbance in a surface state at the light reflecting part of the light interference system. |
