An apparatus and method for sub-micrometer elemental image analysis by mass spectrometry

摘要

A mass spectrometer system for elemental analysis of a planar sample is provided. In some embodiments, the mass spectrometer system comprises: a primary ion source capable of irradiating a segment on planar sample with a beam of primary ions that is less than 1 mm in diameter, c) an orthogonal ion mass-to-charge ratio analyzer positioned downstream of sample interface, the analyzer being configured to separate secondary elemental atomic ions according to their mass-to-charge ratio by time of flight; d) an ion detector for detecting the secondary elemental atomic ions and producing mass spectra measurements; and e) a synchronizer, wherein the system is configured so that so that the beam of primary ions scans across the planar sample in two dimensions and the synchronizer associates the mass spectra measurements with positions on the planar sample.