| 摘要 |
PURPOSE:To enhance sensitivity, film remaining rate, and resolution by using an aqueous alkali-soluble resin having vinylphenol structures, a cross-linking agent of alkoxymethylated benzoguanamine resin, and a specified photo acid generator. CONSTITUTION:The aqueous alkali-soluble resin has the vinylphenol structures obtained radically polymerizing vinylphenols, such as 4-vinylphenol, by using a polymerization initiator, and the cross-linking agent is the alkoxymethylated guanamine resin, obtained by converting benzoguanamine into N-methylol by sodium hydroxide or the like and allowing lower alcohol to react with it, and the photo acid generator is a compound represented by the formula in which X is H or Br. |
